منابع مشابه
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In this paper modeling of capacitance and sensitivity for MEMS capacitive pressure sensor is presented. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes versus pressure. Therefore first the diaphragm displacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM). It can b...
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ژورنال
عنوان ژورنال: eLife
سال: 2018
ISSN: 2050-084X
DOI: 10.7554/elife.34396